Main Items | Model | Origin of Manufacturer |
Solid-state microwave source | 6KW/2450±50 MHz | Domestic or imported |
Input power | 380V/50Hz±5% 9KW | Domestic |
Microwave magnetron | 10KW/2450MHz | Toshiba, Hitachi (optional) |
Microwave reaction chamber | Cylindrical | Self-made |
Gas flow system | 4-way gas mass flowmeter and gas valve | Japan |
Vacuum system | Vacuum valve and filter | Japan |
Electric control system | PLC + touch screen | Siemens |
Measure | Vacuum gauge, infrared thermometer | Domestic |
Sample deposition platform | ≥50mm | Self-made |
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