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Microwave Plasma Chemical Vapor Deposition(MPCVD) Equipment
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MPCVD Equipment

Main Items

Model

Origin of Manufacturer

Solid-state microwave source

6KW/2450±50 MHz

Domestic or imported

Input power

380V/50Hz±5% 9KW

Domestic

Microwave magnetron

10KW/2450MHz

Toshiba, Hitachi (optional)

Microwave reaction chamber

Cylindrical

Self-made

Gas flow system

4-way gas mass flowmeter and gas valve

Japan

Vacuum system

Vacuum valve and filter

Japan

Electric control system

PLC + touch screen

Siemens

Measure

Vacuum gauge, infrared thermometer

Domestic

Sample deposition platform

≥50mm

Self-made

Address: No.3,Lane 3,Yingcai Technical Park,High-tech Zone,Guilin,China,541004 Tel: +86-773-5822022 Fax: +86-773-5822066 E-mail: glsd@gk-pdc.com

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